Data used in the publication "Creation and characterization of free-standing cryogenic targets for laser-driven ion acceleration". A technique for the creation of free-standing cryogenic targets for laser-driven ion acceleration is presented, which allows to create solid state targets consisting of initially gaseous materials. In particular, the use of and the methods for its preparation as a target material for laser-driven ion acceleration are discussed. Moving in the phase diagram through the liquid phase leads to the substance covering an aperture on a cooled copper frame where it is solidified through further cooling. An account of characterization techniques for target thickness is given, with a focus on deducing thickness values from distance values delivered by chromatic confocal sensors. The target type covered in this publication was used for experiment 13210007, Vulcan, Target Area Petawatt.EP/K022415/1 EPSRC