| dc.creator | Mackay, RE | |
| dc.creator | Lionis, N | |
| dc.creator | Le, HR | |
| dc.date | 2015-02-23T11:21:53Z | |
| dc.date | 2015-02-23T11:21:53Z | |
| dc.date | 2011-12-01 | |
| dc.date.accessioned | 2022-05-26T18:53:40Z | |
| dc.date.available | 2022-05-26T18:53:40Z | |
| dc.identifier | 0946-7076 | |
| dc.identifier | http://hdl.handle.net/10026.1/3257 | |
| dc.identifier | 10.1007/s00542-011-1362-3 | |
| dc.identifier | 1432-1858 | |
| dc.identifier.uri | http://localhost:8080/xmlui/handle/CUHPOERS/208668 | |
| dc.format | 1763 - 1770 | |
| dc.language | en | |
| dc.relation | ISSN:0946-7076 | |
| dc.relation | E-ISSN:1432-1858 | |
| dc.rights | Not known | |
| dc.title | 3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS | |
| dc.type | Journal Article |
| Files | Size | Format | View |
|---|---|---|---|
| 542_2011_1362_Author_Checked.pdf | 877.1Kb | application/pdf |
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