Sangam: A Confluence of Knowledge Streams

Comparison of Radio-Frequency Power Architectures for Plasma Generation

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dc.contributor Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.creator Al Bastami, Anas Ibrahim
dc.creator Zhang, Haoquan
dc.creator Jurkov, Alexander
dc.creator Radomski, Aaron
dc.creator Perreault, David J
dc.date 2021-03-08T20:28:31Z
dc.date 2021-03-08T20:28:31Z
dc.date 2020-11
dc.date 2020-11
dc.date.accessioned 2023-03-01T18:11:42Z
dc.date.available 2023-03-01T18:11:42Z
dc.identifier 9781728171609
dc.identifier 9781728171616
dc.identifier https://hdl.handle.net/1721.1/130101
dc.identifier Al Bastami, Anas et al. "Comparison of Radio-Frequency Power Architectures for Plasma Generation." 2020 IEEE 21st Workshop on Control and Modeling for Power Electronics, November 2020, Aalborg, Denmark, Institute of Electrical and Electronics Engineers, November 2020. © 2020 IEEE
dc.identifier.uri http://localhost:8080/xmlui/handle/CUHPOERS/279107
dc.description Applications such as plasma generation require the generation and delivery of radio-frequency (rf) power into widely-varying loads while simultaneously demanding high accuracy and speed in controlling the output power across a wide range of power levels. Attaining high efficiency and performance across all operating conditions while meeting these system requirements is challenging, especially at high frequencies (10s of MHz) and power levels (1000s of Watts and above). This paper evaluates different architectures that directly address these challenges and enable efficient high-frequency operation over a wide range of output power levels and load impedances with the capability of fast output power control (e.g., within a few microseconds). We review techniques for achieving fast output power control and evaluate their suitability in efficient rf systems demanding accurate and fast control of output power. Two dc-to-rf system architectures utilizing the discussed power control techniques are presented to illustrate both the achievable performance benefits as well as their robustness to load impedance variation, and are compared using time-domain simulations. The results indicate the ability of the proposed architectures to maintain high efficiency (> 90%) across a very wide range of output power levels (e.g., over a factor of up to 85x) while being robust to load impedance variations.
dc.format application/pdf
dc.publisher Institute of Electrical and Electronics Engineers (IEEE)
dc.relation http://dx.doi.org/10.1109/compel49091.2020.9265700
dc.relation 2020 IEEE 21st Workshop on Control and Modeling for Power Electronics
dc.rights Creative Commons Attribution-Noncommercial-Share Alike
dc.rights http://creativecommons.org/licenses/by-nc-sa/4.0/
dc.source Prof. Perreault via Phoebe Ayers
dc.title Comparison of Radio-Frequency Power Architectures for Plasma Generation
dc.type Article
dc.type http://purl.org/eprint/type/ConferencePaper


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