Sangam: A Confluence of Knowledge Streams

Aufbau einer Interferenzlithografie-Anlage zur Herstellung photonischer Kristalle

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dc.contributor Applied optics
dc.creator Mellert, Karolin
dc.date 2016-06-27T19:03:40Z
dc.date 2016-06-27T19:03:40Z
dc.date 2002-12
dc.date.accessioned 2023-03-03T07:27:13Z
dc.date.available 2023-03-03T07:27:13Z
dc.identifier eprint:275
dc.identifier http://hdl.handle.net/10919/71551
dc.identifier.uri http://localhost:8080/xmlui/handle/CUHPOERS/281973
dc.description Multiple laser beam interference allows to produce periodic light patterns in the order of the wavelength of light. A simulation program helps to identify different patterns and to investigate the influence of changing parameters such as e.g. the angle of incidence or the polarization. A positive photoresist (Shipley S1805) is used to create two-dimensional metallic photonic crystals by UV interference lithography.
dc.format application/pdf
dc.format application/pdf
dc.language de
dc.publisher Rheinische Friedrich-Wilhelms-Universität Bonn
dc.rights In Copyright
dc.rights http://rightsstatements.org/vocab/InC/1.0/
dc.subject photonic crystal
dc.subject interference
dc.subject lithography
dc.subject Simulation
dc.subject metal
dc.subject gold
dc.subject plasmon
dc.subject S1805
dc.subject Shipley
dc.subject positive photoresist
dc.subject QC
dc.title Aufbau einer Interferenzlithografie-Anlage zur Herstellung photonischer Kristalle
dc.type Thesis


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