Sangam: A Confluence of Knowledge Streams

Growth and characterization of aluminum nitride (AIN) films for eletroacoustic and MEMS applications.

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dc.contributor Base, G.
dc.contributor Tulsi, G.
dc.creator Kar, Jyoti Prakash
dc.date 2014-06-17T08:40:07Z
dc.date 2019-02-11T06:08:49Z
dc.date 2014-06-17T08:40:07Z
dc.date 2019-02-11T06:08:49Z
dc.date 2006
dc.date.accessioned 2023-04-19T05:00:53Z
dc.date.available 2023-04-19T05:00:53Z
dc.identifier http://localhost:8080/iit/handle/2074/2582
dc.identifier.uri http://localhost:8080/xmlui/handle/CUHPOERS/286958
dc.format application/pdf
dc.language en
dc.relation TH-3395;
dc.title Growth and characterization of aluminum nitride (AIN) films for eletroacoustic and MEMS applications.
dc.type Thesis


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